Showcase the innovative solutions

Gate valve control

Application field:

The load-lock chamber/handling system/process chamber of the coating production line in the semiconductor or opto-electronic industry.

Application highlights:

• Significantly reduce the impact force generated when opening and closing the door valve
• Application achieves control of multiple valves in a single component
• Achieving high repeatability accuracy through a set of digital parameters
• Easy to track, very suitable for industrial IoT

Lift Pin Control

Application field:
For corrugated tube cylinders used to control Lift Pin in semiconductor equipment.

Application highlights:

• Realize precise control and monitoring of pneumatic technology in terms of running time, speed, and accuracy
• Achieve smooth and synchronized up and down operation of the wafer, ensuring more stable travel time and reducing unexpected machine shutdowns
• Standardize the adjustment of Lift Pin to replace manual adjustments and save maintenance time.

Cylinder synchronization control

Application field:
Wet cleaning process for semiconductor wafers

Application highlights:

• Using 2-way customized piezoelectric valve VEAC to precisely control the synchronous movement of 2 low friction cylinders, achieving continuous adjustable speed and position during the lifting process of large-sized wafer cleaning protective bowl
• Using an electric cylinder with protective functions to provide swing and flat feed for the cleaning nozzle

氮气吹扫系统 N2 Purge

应用领域：

适用于 STOCKER、FOUP、OHT和STB等各种晶圆输送和储存场合等需要微污染防治的半导体晶片先进制程。

应用亮点：

• 可透过流量控制与湿度检测进行精密的控制
• 压电阀设计达到精准的流量控制，每分钟高达 200 公升
• 简化工程设计、调试和操作，整合化模组设计，即装即用的解决方案
• 可将多片MFC整合成阀岛进行设置