Showcase the innovative solutions

Gate valve control

Application field:

The load-lock chamber/handling system/process chamber of the coating production line in the semiconductor or opto-electronic industry.

Application highlights:

• Significantly reduce the impact force generated when opening and closing the door valve
• Application achieves control of multiple valves in a single component
• Achieving high repeatability accuracy through a set of digital parameters
• Easy to track, very suitable for industrial IoT

Lift Pin Control

Application field:
For corrugated tube cylinders used to control Lift Pin in semiconductor equipment.

Application highlights:

• Realize precise control and monitoring of pneumatic technology in terms of running time, speed, and accuracy
• Achieve smooth and synchronized up and down operation of the wafer, ensuring more stable travel time and reducing unexpected machine shutdowns
• Standardize the adjustment of Lift Pin to replace manual adjustments and save maintenance time.

Cylinder synchronization control

Application field:
Wet cleaning process for semiconductor wafers

Application highlights:

• Using 2-way customized piezoelectric valve VEAC to precisely control the synchronous movement of 2 low friction cylinders, achieving continuous adjustable speed and position during the lifting process of large-sized wafer cleaning protective bowl
• Using an electric cylinder with protective functions to provide swing and flat feed for the cleaning nozzle

N2 Purge

Application field:
Suitable for advanced semiconductor wafer processes that require micro pollution prevention and control in various wafer transportation and storage scenarios such as STOCKER, FOUP, OHT, and STB.

Application highlights:

• Precision control can be achieved through flow control and humidity detection
• The piezoelectric valve design achieves precise flow control, up to 200 liters per minute
• Simplify engineering design, debugging, and operation, integrate module design, and provide an on-demand solution
• Multiple MFCs can be integrated into valve islands for setup