Orifices are the simplest form of nitrogen flow control. These are mechanical tapers (fixed drilled holes) in the tubing system through which a specific amount of nitrogen flows at constant pressure. The advantage: extremely favourable total costs, often less than €90 including installation as well as a simple switching valve and the orifice itself. This makes them ideal for adjusting simple flow rate applications for nitrogen with stable conditions.
A frequently used product in this context is the MH1 valve. This is an inexpensive standard valve which, in combination with an orifice, offers a functional, analogue solution for regulating the gas flow rate in industry. In many applications, this combination is sufficient, especially if the investment pressure is high or no digital feedback is required.
However, there are clear limits:
Please note: if you still want to record measured values at a later date, additional hardware is required (e.g. separate pressure or flow sensors and the necessary input on the controller), which increases the costs and system complexity. Despite the very long service life and reliability of simple switching valves such as the MH1, they are not ideal for processes in which cleanliness is critical. Their design means that higher particle emissions are to be expected compared to dedicated mass flow controllers.
However, many production lines continue to rely on this principle, especially when only simple volumetric flow rates need to be kept constant and appropriate filters reabsorb the particles. But as soon as dynamic adjustments, reliable monitoring or process traceability are required, this solution quickly reaches its limits.
Mass flow controllers such as VEFC, VEMD or VEAD offer methods for regulating the nitrogen flow rate that fixed orifices or adjustable throttle valves cannot.
The products themselves are not "intelligent" in that they can autonomously detect anomalies but they are AI-ready. In conjunction with filter monitoring, pressure sensors and algorithms, the degree of pollution of filters can be detected, for example, which enables timely servicing without interrupting production.
Before deciding on a specific valve, you should take a close look at the technical requirements and the application environment. Each valve has its own strengths, be it in terms of flow rate, size or connectivity.
虽然简单系统的购置成本更低，但搭载监控功能的可靠减压阀却具有决定性优势：
示例：在装有 50 个减压阀的装置中，每台设备上的简易显示屏可以帮助用户快速识别缺陷区域，而无需逐一读取数值。
先进的质量流量控制器可以提供宝贵的数据，比如流量、压力、温度等，这些数据可以集成到 Festo AX 等上级系统中。 这使以下功能成为可能：
这些设备本身并不“智能”，但它们支持 AI，也为面向未来的数据支持型制造工艺奠定了基础。
选择阀时，需要考虑多种因素：
未来我们将使用互动工具进行个性化推荐，从简单的节流孔到支持 AI 的 VEFC，通过有针对性地询问为您推荐最合适的解决方案。
半导体制造中的氮气调节远不止是技术小问题这么简单，它对质量、工艺稳定性和成本都有影响。 无论简单解决方案还是高度先进的闭环控制技术，决定性因素都是您的应用需求。 做出正确的选择，不仅能确保安全运行，还可提高效率和未来竞争力。