The economical alternative for precisely controlling inert gases
Mass flow controller VEFC is ideal for the semicon industry in particular, but it is also well suited for precisely controlling inert gases virtually anywhere. The very compact VEFC extends the Controlled Pneumatics product portfolio. At the same time, it has all the advantages of piezo valves: maximum dynamic response, infinite precision, very low power consumption and heat generation and a stable flow rate without the need for manual adjustment. And all that at a very attractive price/performance ratio.
Economical, reliable, and precise N2 purging
A wide variety of flow rates can be regulated in the individual purge steps with VEFC in the load port. It ensures that only the absolutely necessary amount of nitrogen is used, whether during pre-blowing, pre-purge, process purge and post-purge. This saves nitrogen and reduces the process time until the dry shielding gas atmosphere is reached.
